Apparatus for ablating high-density array of vias or indentation in surface of object

ABSTRACT

An imaging system for ablating an array matrix of high-density vias in a flexible and rigid desired object. The apparatus contains a mirror based x, y scanning repeat positioning and/or a single axis scanner positioning system that directs a single point of a coherent light radiation beam at desired individual mask segments. These mask segments are formed into a planar mask array. A flat field collimating lens system is positioned between the mirror scanning system and the mask arrays to correct the angular beam output of the repeat positioning mirror and redirects the beam so that it strikes a specific rear surface segment(s) of in the mask array. The flat field collimating lens provides a beam that either illuminates the mask perpendicular to its surface or at preselected optimized illumination angles. Once illuminated, the specific segment of the mask array images and processes a single or a plurality of desired holes or features in a top surface of a flexible or rigid desired object to be processed.

This application is a continuation-in-part of Ser. No. 09/514,084 filedFeb. 28, 2000 which claims benefit of provisional No. 60/168,478 filedOct. 8, 1999.

FIELD OF THE INVENTION

The present invention relates to a system for burning, drilling, orotherwise forming one or more desired vias, blind vias or other surfaceindentations, indicia, markings and/or other formations in a surface ofa desired object, such as a substrate.

BACKGROUND OF THE INVENTION

There are currently available a variety of systems for forming a hole, avia, a blind via or some other surface indentation in an exteriorsurface of an object, but many of these systems are very expensive topurchase and operate at relatively slow production rates.

SUMMARY OF THE INVENTION

Wherefore, the present invention seeks to overcome the above noteddrawbacks of the prior art by providing a system which is relativelyinexpensive to purchase and maintain while, at the same time, operatesat increased production speeds so that the desired vias, blind vias, orother surface indentations, apertures or other surface markings can beachieved in a surface of a desired object during a shorter period ofproduction time.

A further object of the present invention is to provide a method andapparatus for ablating a desired high-density array or pattern of viasor other surface indentations or formations in a surface of an object tobe processed.

Another object of the invention is to facilitate use of a variety ofdifferent lasers which operate at different wavelengths and pulsedurations, to minimize the associated costs in connection with ablatinga high-density array of blind vias, vias or other surface indentationsor formations in a surface of an object to be processed. It is to beappreciated that an ultraviolet, a visual, an infrared as well as othertypes of lasers, extending across the entire spectrum, could be utilizedin accordance with the teaching of the present invention.

Yet another object of the present invention is to provide a method andapparatus which allows the number of vias or other indentations orformations, to be formed in a surface of an object being processed, tobe easily varied during production of the same by control of theintensity and/or duration of a substantially collimated ornon-collimated light beam emanating from the laser.

Still another object of the invention is to provide an apparatus whichis relatively less inexpensive to purchase and operate, in comparison toother known systems, while still improving the production rates of theobjects to be processed.

The present invention also relates to an imaging system for ablating adesired array of features in an object to be processed, the imagingsystem comprising: a laser for generating an outputting a coherent lightbeam; an X-axis and Y-axis automatic repeat position for redirecting apath of the coherent light beam; a focusing member for receiving theredirected light from the X- and Y-axis repeat positioners and focusingthe coherent light beam at a desired one of a plurality of holographicimaging segments forming a holographic imaging lens; and each one of theholographic imaging segments, comprising the holographic imaging lens,forming a desired formation in a surface of the object to be processed.

The present invention also relates to an imaging system for ablating adesired array of features in an object to be processed, the imagingsystem comprising: a laser for generating an outputting a coherent lightbeam; at least one expansion lens for receiving the coherent light beam,outputted by the laser, and suitably altering a diameter of the coherentlight beam; an X-axis and Y-axis automatic repeat position forredirecting a path of the coherent light beam; a focusing member forreceiving the redirected light from the X- and Y-axis repeat positionersand focusing the coherent light beam at a desired one of a plurality ofholographic imaging segments forming a holographic imaging lens; andeach one of the holographic imaging segments, comprising the holographicimaging lens, forming a desired formation in a surface of the object tobe processed; and a computer for controlling operation of one or more ofthe laser, the X- and Y-repeat positioners, the focusing member, theholographic imaging lens, and a position of the object to be processedto facilitate ablating a desired array of features in the object to beprocessed.

The present invention also relates to an imaging system for ablating adesired array of features in an object to be processed, the imagingsystem comprising: laser means for generating an outputting a coherentlight beam; an X-axis and Y-axis automatic repeat positing means forredirecting a path of the coherent light beam; focusing means forreceiving the redirected light from the X- and Y-axis repeat positingmeans and focusing the coherent light beam at a desired one of aplurality of holographic imaging means forming a holographic imaginglens means; and each one of the holographic imaging means, comprisingthe holographic imaging lens means, forming a desired formation in asurface of the object to be processed.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will now be described, by way of example, with referenceto the accompanying drawings in which:

FIG. 1 is a perspective view diagrammatically showing the entire systemof the present invention;

FIG. 2 is an enlarged perspective diagrammatic view of FIG. 1 showingthe laser image system according to the present invention;

FIG. 3 is a diagrammatic representation showing an X-axis and Y-axisautomate repeat positioner, a collimating lens and a holographic lenswhich are combined as a single unit for use as the laser imaging systemof the present invention;

FIG. 4 is a perspective view diagrammatically showing a mask for usewith the laser imaging system of the present invention;

FIG. 5 is a diagrammatic transverse cross-sectional view of substratehaving a plurality of different sizes blind vias formed therein by thelaser imaging system of the present invention;

FIG. 6 is a diagrammatic perspective view of a second embodiment of thelaser imaging system of the present invention;

FIG. 7 is a diagrammatic perspective view of a third embodiment thelaser imaging system, according to the present invention, for formingindicia on either a stationary or a moving object to facilitate use ofthe laser imaging system as a typewriter;

FIG. 8 is a diagrammatic perspective view of a fourth embodiment thelaser imaging system, according to the present invention, for forming adesired nozzle array on a stationary object;

FIG. 9 is a diagrammatic perspective view of a fifth embodiment of thelaser imaging system, according to the present invention;

FIG. 10 is a diagrammatic perspective view of a sixth embodiment of thelaser imaging system, according to the present invention;

FIG. 11 is a diagrammatic view showing peripheral components for usewith the imaging system according to the present invention;

FIG. 12 is a diagrammatic perspective view showing a horizontaladjustment mechanism for the holographic imaging lens; and

FIG. 13 is a diagrammatic perspective view showing incorporation of theimaging system, according to the present invention, as part of aproduction line for processing a web.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Turning now to FIGS. 1-4, a detailed description of the imaging system 1apparatus for ablating high-density array of vias or indentations in asurface of an object, according to the present invention, will now beprovided. As can be seen in FIG. 1, a conventional laser 2 (onlydiagrammatically shown in this Figure) is employed for generating andoutputting a laser beam 4. It is to be appreciated that the laser 2 canbe either excimer or non-excimer laser and further details and operatingparameters for the preferred laser, for use with the present invention,will be provided below. The laser beam 4, generated by the laser 2, iseither an ultraviolet, a visible, an infrared, a coherent radiation beamor some other light radiation beam 4 which is supplied along a laseraxis 6 toward at least a first expansion telescope or expansion lens 8and also preferably then supplied to a second expansion telescope orexpansion lens 10. The purpose of the expansion telescope or lens 8and/or 10 is/are to suitably expand the diameter of the generatedultraviolet, visible, infrared or other light radiation laser beam 4 soas to have a desired resulting expanded laser diameter for the laserbeam 4. As such expansion feature and teaching is conventional and wellknown in the art, a further detailed discussion concerning the same isnot provided.

The expanded ultraviolet, visible, infrared or other light radiationbeam 4 then continues, along the laser axis 6, and is directed at andimpinges on a first reflective mirror 12 of an X-axis automated repeatpositioner 14 of the system 1. The first reflective mirror 12 of theX-axis automated repeat positioner 14 controls the X-coordinate, alongthe surface 42 of the object to be processed O, at which theultraviolet, visible, infrared or other light radiation laser beam 4will be reflected. The first reflective mirror 12 suitably redirects oralters the path of substantially all of the ultraviolet, visible,infrared or other light radiation laser beam 4 and then reflects thelaser beam toward a second reflective mirror 16, controlled by a Y-axisautomated repeat positioner 18 of the system 1. The second reflectivemirror 16, associated with the Y-axis automated repeat positioner 18,controls the Y-coordinate, along the surface 42 of the object to beprocessed O, at which the ultraviolet, visible, infrared or other lightradiation laser beam 4 will be reflected. The expanded ultraviolet,visible, infrared or other light radiation beam 4 impinges on the secondreflective mirror 16 and the second reflective mirror 16 suitablyredirects or alters the path of the ultraviolet, visible, infrared orother light radiation laser beam 4 toward a rear surface 24 of a flatfield collimating lens or some other refractive, detractive orholographic component 22, which is conventional and well known in thisart.

Both the X-axis automated repeat positioner 14 and the Y-axis automatedrepeat positioner 18 are coupled to a computer 20 which controls thereflective positions of the first and second reflective mirrors 12 and16, to suitably reflect and/or redirect the ultraviolet, visible,infrared or other light radiation laser beam at a desired impinginglocation along the rear surface 24 of the field collimating lens orholographic component 22. As such automated control feature of theX-axis and the Y-axis automated repeat positioners 14 and 18 isconventional and well known in the art, a further detail discussionconcerning the same is not provided.

A suitable X-axis automated repeat positioner or a Y-axis automatedrepeat positioner 14 or 18 is sold by Cambridge Technology of Cambridge,Mass., as 6870M Optical Scanner Heads. It is to be appreciated thatother currently available scanners or repeat positioners, whichfacilitate accurate reflecting and/or redirecting of a supplied laserbeam, at a desired location of an X, Y coordinate system, could also beemployed with the teaching of the present invention.

The reflected ultraviolet, visible, infrared or other light radiationlaser beam 4′ enters the rear surface 24 of the field collimating lensor other holographic component 22, passes therethrough and is suitablyaltered in a conventional manner by the inherent characteristics of thefield collimating lens or other holographic component 22 so that theultraviolet, visible, infrared or other light radiation laser beam whichis emitted from the front surface 26 of the field collimating lens orother holographic component 22 is a substantially collimated beam 28.This substantially collimated beam 28 is emitted and directed, by thefront surface 26 of the field collimating lens or other holographiccomponent 22, toward a desired area or portion of a rear surface 30 of aholographic imaging lens 32 and strikes and impinges on that desiredarea or portion.

The holographic imaging lens 32 is designed such that as the lightenters by way of the rear surface 30 of one of the holographic imagingsegments 36, the light will be focused, by that holographic imagingsegment 36 of the holographic imaging lens 32, at a desired location orlocations along a top surface 42 of the object to be processed O. Thetop surface 42 of the object to be processed O is located at a desiredworking distance D, for example, between 5 mm and 1000 mm, andpreferably between about 200 to 300 mm from the front surface 38 of theholographic imaging lens 32. The altered light is emitted from the frontsurface 38 of the holographic imaging lens 32 as focused light beam 43.

This focused light beam 43 is directed at a desired location orlocations-depending upon the inherent characteristics of the holographicimaging segment 36, along the top or other desired surface 42 of theobject to be processed O for drilling, burning or otherwise forming adesired blind via(s), aperture(s), opening(s), indicia, indentation(s)or other surface formation(s) 44 therein of a desired size and a desireddepth. It is to be appreciated that the size of the formation(s) 44 isdetermined and/or defined by the design characteristics of eachholographic imaging segment 36 of the holographic imaging lens 32. Inaddition, the depth of the formation(s) 44 is a direct function of theduration or amount of pulses of the laser 2 emitted at the top surface42 of the object to be processed. That is, the longer the duration orgreater of the number of pulses of the laser 2, the greater the depth ofthe desired blind via(s), aperture(s), opening(s), indicia,indentation(s) or other surface formation(s) 44 in the object to beprocessed O, while the shorter the duration or the smaller the number ofpulses from the laser 2, the smaller the depth of the desired blindvia(s), aperture(s), opening(s), indicia, indentation(s) or othersurface formation(s) 44 in the object to be processed O. Asdiagrammatically shown in FIGS. 1 and 2, the focused laser beam 43 isshown drilling, burning or otherwise forming a desired formation(s) 44,such as a blind via, in the top surface 42 of the object to be processedO.

An important distinction between the present invention and the prior artis that X-axis and the Y-axis automated repeat positioner 14, 18 areparticularly adapted to reflecting the laser beam at only selected ordesired rear area or areas of the holographic imaging lens 32, not theentire rear surface of the holographic imaging lens 32. As isconventionally done in the prior art, the scanners are employed to scanthe laser beam across the entire rear surface of the holographic imaginglens, not only at a selected area or areas, as achieved by the presentinvention.

With reference to FIG. 3, a X-axis, Y-axis automated repeat positioner,collimating lens and holographic unit combined assembly 37 can be seen.The X and Y-axis automated repeat positioners are generally designatedas 14, 18, the collimating lens or other holographic component 22 islocated beneath the automated positioners, and the holographic imaginglens 32 is located to receive the collimated light from the collimatinglens or other holographic component 22. The arrangement results in acompact design for the main components of the imaging system 1 of thepresent invention.

As can be seen in further detail in FIG. 4, the holographic imaging lens32, according to the present invention, is partitioned into a pluralityof desired separate holographic imaging segments 36 and each holographicimaging segment 36 is designed to form, burn or drill at least one, andpossibly two or more, desired size via, blind via, hole, aperture,indicia, indentation, feature or other formation 44 in the top surface42 of the object to be processed O. The holographic imaging lens 32, asshown in FIGS. 1, 2 and 4, is partitioned into thirty-six (36) differentholographic imaging segment 36 and each holographic imaging segment 36is designed to form, according to the first embodiment, a correspondingblind desired blind via(s), aperture(s), opening(s), indicia,indentation(s) or other surface formation(s) 44 in the top surface 42 ofthe object to be processed O.

It is to be appreciated that the number of holographic imaging segments36, being incorporated into the holographic imaging lens 32, can varyfrom application to application. Further, the number of desired blindvia(s), aperture(s), opening(s), indicia, indentation(s), feature(s) orother surface formation(s) 44, to be formed by each holographic imagingsegment 36, can be vary from application to application. Accordingly,the holographic imaging lens 32, according to the present invention, canbe designed to drill, form or otherwise burn only a few or many tens ofthousands of desired blind via(s), aperture(s), opening(s), indicia,indentation(s), feature(s) or other surface formation(s) 44 in thedesired object to be processed O. The important feature, according tothe present invention, is that all the holographic imaging segments 36are arranged and located closely adjacent one another so as to all liein the same plane P, which plane extends parallel to the top surface 42of the object to be processed O, so as to be readily illuminated withthe focused light beam 43.

The holographic segments 36 are either glued or otherwise are affixed toone another in a conventional manner or a perimeter retaining ring orsome other retaining member encases and maintains the holographicsegments in their close adjacent planar relationship. Alternatively, theholographic imaging lens 32 can be formed from a single unitary piece ofmaterial and each holographic segment can be designed to form thedesired blind via(s), aperture(s), opening(s), indicia, indentation(s),feature(s) or other surface formation(s) 44.

According to the present invention, the X-axis and the Y-axis automatedrepeat positioners 14 and 18 are controlled by the computer 20, or otherautomated system to select the desired area or portion of the rearsurface 24 of the field collimating lens or other holographic component22 to be illuminated by the substantially collimated beam 28. Thesubstantially collimated beam 28 passes through the field collimatinglens or other holographic component 22 and emanates from a front surface26 thereof toward the rear surface of a desired one of the holographicimaging segments 36 of the holographic imaging lens 32. Thesubstantially collimated beam 28 strikes a desired area or portion,within the desired holographic imaging segment 36, and the substantiallycollimated beam 28 is focused, in a conventional manner, by theholographic imaging segment 36 to result in the focused beam 43 whichfacilitates drilling, burning, or formation of the desired blind via(s),aperture(s), opening(s), indicia, indentation(s), feature(s) or othersurface formation(s) 44 in the top surface 42 of the object to beprocessed O.

The holographic imaging lens 32, which comprises a plurality ofholographic imaging segments 36, can be obtained from a variety ofsources such as, for example, Diffraction Ltd. of Waitsfield, Vt.,Digital Optics Corporation, of Charlotte, N.C., MEMS Optical, LLC. ofHuntsville, Ala. and Rochester Photonics Corp. of Rochester, N.Y.

It is to be appreciated that if a total of thirty-six (36) holes orformations 44 were to be formed in the top surface 42 of the object tobe processed O, as shown in FIGS. 1 and 2, each one of the holographicimaging segments 36 of the holographic imaging lens 32 would be designedto form a single desired blind via(s), aperture(s), opening(s), indicia,indentation(s), feature(s) or other surface formation(s) 44 and besequentially illuminated with the substantially collimated beam 28, in adesired sequential illumination order, for a desired number of pulses ora desired pulse duration. Alternatively, if only some desired blindvia(s), aperture(s), opening(s), indicia, indentation(s), feature(s) orother surface formation(s) 44 are required to be burned, drilled orformed in the top surface 42 of the object to be processed O, but otherdesired blind via(s), aperture(s), opening(s), indicia, indentation(s),feature(s) or other surface formation(s) 44 are not required, only theholographic imaging segments 36 which are designed to form the desiredblind via(s), aperture(s), opening(s), indicia, indentation(s),feature(s) or other surface formation(s) 44 in the top surface 42 of thesubstrate to be processed O are illuminated with the substantiallycollimated beam 28 while the holographic imaging segments 36, whichwould form the unwanted blind via(s), aperture(s), opening(s), indicia,indentation(s), feature(s) or other surface formation(s) 44 in the topsurface 42 of the substrate to be processed O, are not illuminated withthe substantially collimated beam 28.

The holographic imaging lens 32, as can be seen in FIG. 4, essentiallycomprises a plurality of separate holographic imaging lens or segments36 which are all located closely adjacent one another, in a desiredorientation and all lying substantially in the same plane P to form acontinuous unitary component. This arrangement facilitates a compactdesign of the holographic imaging lens 32 and allows the system toselectively and readily control which holographic imaging segment orsegments 36, of the holographic imaging lens 32, are activated duringproduction of a desired substrate or object to be processed O viaappropriate control of the X-axis and the Y-axis automated repeatpositioners 14 and 18. Such construction provides the system, accordingto the present invention, with greater flexibility and allows variationin the amount and location of the desired blind via(s), aperture(s),opening(s), indicia, indentation(s), feature(s) or other surfaceformation(s) 44 to be formed, burnt or drilled in the top surface 42 ofobject to be processed O during commercial production of the same.

With reference to FIG. 5, an example of an object to be processed O canbe seen. As shown in this Figure, the object to be processed O containsa base layer 50 which comprises, for example, a standard metal such asaluminum, copper, gold, molybdenum, nickel, palladium, platinum, silver,titanium, tungsten, metal nitrides or a combination(s) thereof. Thethickness of the metal base layer 50 may vary but typically rangesbetween about 9 to about 36 μm and may be as thick as about 70 μm. Thetop layer 52 comprises, for example, a standard organic dielectricmaterials as BT, cardboard, cyanates esters, epoxies, phenolics,polyimides, PTFE, various polymer alloys, or combinations thereof. Thethickness of the top layer 52 is generally thicker than the base layer50 and typically ranges between about 50 to about 200 μm.

As can be seen in FIG. 5, a plurality of blind vias 46 are formedtherein and some of the blind vias 46 can have different diameters. Asnoted above, the diameter of the blind vias 46 are determined by thefocusing characteristics of the holographic imaging lens 32, e.g. theholographic imaging lens focuses the supplied collimated light beam 28over a wider area to achieve larger diameter blind via and focuses thelight over a narrower area to achieve narrower diameter blind via. Inboth cases, it is to be appreciated that the duration or number ofpulses are controlled by the imaging system 1 to insure that the entiretop layer 52 of the object to be processed O is obliterated to therebyexpose the underlying metal base layer 50 while being of a substantiallyshort enough intensity and duration so as not to in any way destroy orobliterate the underlying base layer 50.

It is to be appreciated that a variation of the holographic imaginglens, as shown in FIG. 6, can be substituted in place of the fieldcollimating lens 22. If a collimating holographic imaging lens 22′ isemployed as the field collimating lens, then the collimating holographicimaging lens 22′ is designed so as to receive light from the X-axis andthe Y-axis automated repeat positioners 14 and 18 and redirect thesupplied ultraviolet, visible, infrared or other light radiation laserbeam 4, as a substantially collimated beam 28, at a desired rear surfaceof one of the holographic imaging segments 36 of the holographic imaginglens 32 . The collimating holographic imaging lens 22′ is designed tocollimate the supplied light beam and redirect the beam 4′ light towardthe holographic imaging lens 32 so that the substantially collimatedbeam 28 enters the rear surface of the holographic imaging lens 32 at anangle of about of between about 0° to about 90° or some otherpredetermined angle depending upon the design parameters of the imagingsystem 1.

The inventors have appreciated that if the substantially collimated beam28, supplied by the field collimating lens or other holographiccomponent 22, is redirected at the rear surface of the holographicimaging lens 32 at an angle of about 45° or so, the efficiency of theholographic imaging lens 32 is significantly increased over theefficiency when the substantially collimated beam 28 is redirected atthe rear surface of the holographic imaging lens 32 at an angle of about90°. That is, the efficiency of the holographic imaging lens 32 is lesswhen the substantially collimated beam 28 enters the rear surface of theholographic imaging lens 32 at an angle of about 90° while theefficiency increases if the substantially collimated beam 28 enters therear surface of the holographice imaging lens 32 at a suitable angle ofabout between 0° and 90°. Accordingly, thee desired angle in which thesubstantially collimated beam 28 enters the rear surface of theholographic imaging lens 32 can vary, from application to application,and can be determined by trial and error depending upon the parametersof the imaging system 1. Therefore, by using a collimating holographicimaging lens as the field collimating lens 22, the overall efficiency ofthis system can be increased without changing or modifying any of theother system requirements or parameters.

Turning now to FIG. 7, the holographic imaging lens 32 can be designedto result essentially in a holographic imaging keyboard 32Δ, e.g. therecan be twenty-six (26) holographic imaging segments 36Δ with eachholographic segment being designed to form, burn or drill a one of the26 letters of the alphabet, an additional ten (10) holographic imagingsegments 36Δ with each additional holographic segment being designed toform, burn or drill one number from zero through 9, and a furtherplurality of holographic imaging segments 36Δ with each furtherholographic segment being designed to form, burn or drill desiredpunctuation, indicia, emblem, design logo, etc. By operation of thelaser (not shown in this Figure) and adequately controlling of theX-axis and the Y-axis automated repeat positioners 14, 18, via thecomputer 20 as described above, the ultraviolet, visible, infrared orother light radiation laser beam 4 can be suitably collimated andsupplied at a rear surface of a desired one of the holographic imagingsegments 36Δ of the holographic imaging keyboard 32Δ to type, drill orform a desired letter, numeral, indicia, etc., in a top surface of anobject to be processed, e.g. a cable or wire 51 running at high speedwhich is to have a desired marking, such as “A 0903C”, formed in anexterior surface thereof.

According to this embodiment, each image or other indicia to be formedby the holographic imaging keyboard 32Δ is focused by an appropriatedone of the holographic imaging segments 36Δ, once that segment is struckwith the supplied ultraviolet, visible, infrared or other lightradiation laser beam 4, to form the desired indicia at the same area or“printing location” 53. Accordingly, during operation of the imagingsystem 1, as a cable or wire 51, for example, moves past the “printinglocation” 53, the X-axis and the Y-axis automated repeat positioners 14,18 are controlled by the computer 20 to select the desired one of theholographic imaging segment(s) 36Δ so as to type, burn, drill or form adesired letter, numeral, character, indicia, etc., in an exteriorsurface 54 of the wire 51 or other object as the wire 51 moves past the“printing location” 53. It is to be appreciated that the system,according to the present invention, incorporating the holographicimaging keyboard 32Δ operates at a very high speed such that the desiredletter, numeral, character, indicia, etc., are essentially printed insequential order, one after the other, to result in a desired imprintedpattern, e.g. “A 0903C”, on the wire 51.

Instead of using alphanumeric characters for the keyboard, each segment36Δ can be provided with suitable light altering information for forminga desired bar code or other convention and when known marking indicia onan exterior surface of an object as it moves relative to the imagingsystem 1 or remains stationary at the “printing location” 53. As suchteaching is conventional and well known to those skilled in the art, afurther detailed description concerning the same will not be provided.

The above described embodiment is particularly useful for markingalpha-numeric characters at a rate that is approximately double the rateof any known marking system currently available on the market. Theimaging system 1 uses a specially designed segmented array to create therequired surface marks, which may be, for example, bar codes, letters,numbers, punctuation marks, logos, foreign characters, etc. Thissegmented array is designed to image every character of the array at thesame location while the object or component, requiring the surfacemarking, is suitably moved or indexed relative to the printing zone orlocation 53 so as to mark the desired bar code(s), letter(s), number(s),punctuation mark(s), logo(s), foreign character(s), etc., in theexterior surface of the object or component.

A further application of the imaging system 1, according to the presentinvention, is to for use with marking different fiber materials with acode or code identifying or designating a specific production batchnumber(s), date(s), production facility, and other desired informationthat would be helpful or beneficial to a forensic investigator(s) wheninvestigating a crime scene or when explosives have been used. Suchsmall fibers can be made from a host of materials such as Kevlar®,carbon, glass, quartz, stainless steel, plastic, etc. The imaging system1, according to the present invention, will allow these fibers to beeffectively processed or marked, at extremely low costs and at a highspeed, to assist with identification.

A further application of the present invention is two-dimensional barcode marking at high speed. The imaging system 1, according to thepresent invention, can be configured to provide high speed productionmarking of two-dimensional bar codes onto a either a stationary or amoving surface of a product or object. The system's segmented lens arraycan be used to image a series or group of associated indentations orother surface markings that can be formed into a two-dimensional barcode or other indicia that can be read using standard optical characterrecognition software. This method and system for marking is similar tothe way the present invention drills, burns or forms the holes of anozzle array except the system will only sufficiently mark the topsurface to form the desired two-dimensional bar code character or otherindicia. It is to be appreciated that a plurality of closely arrangedand aligned indentations or surface marks will comprise or form eachdesired bar code(s), letter(s), number(s), punctuation, mark(s),logo(s), foreign character(s), etc. The imaging system 1 offers anextremely high rate marking capability that is currently not availableby prior art marking systems.

It is to be appreciated that the imaging system 1, of the presentinvention, can be used to perforate a plurality of small orifices orholes (see FIG. 8), in a single or a multi-layered material, to enablethe formation of a desired nozzle array for use in forcing a liquid(e.g. a perfumed, a solvent, a pharmaceutical, a chemical, etc.)therethrough to result in a desired spray configuration or pattern. Theforce fluid, upon exiting from the nozzle array, is atomized into smallminute particles and dispersed in a desired spray configuration at atarget. The imaging system, according to the present invention, allowsthe formation of such orifices, nozzles, holes, etc., in a variety ofdifferent materials including, but not limited to, stainless steel,polyimide, lexan, brass, molybdenum, copper, aluminum, etc, for example.

The present invention is also well-suited for forming a set of miniaturesurface markings on an interior surface adjacent a breech end of a gunbarrel of a firearm. In particular, the present system can be employedto form a desired unique bar code, matrix, an alpha numeric code, or anydesired identifying indicia on an inner surface of the firearm, adjacentthe breech end of the gun barrel. Once the gun barrel is suitablyprocessed or marked with the identifying indicia, when the firearm isdischarged in a conventional manner, the loaded gun shell normallyexpands slightly, due to the gunpowder within the gun shellinstantaneously igniting and heating the gun shell. This rapid expansionof the gun shell causes the exterior surface of the gun shell to beforced against the inwardly facing surface adjacent the breech end ofthe gun barrel such that the identifying indicia, formed on the inwardlyfacing surface of the breech end of the gun barrel, forms a mating ormatching impression or marking on the exterior surface of the gun shell.Upon discharge of the gun shell from the gun barrel, this matchingimpression or marking facilitates identifying which gun shell wasdischarged from which gun barrel. Such marking of the gun shell assistsballistics experts with confirming that a particular gun shell wasdischarged from a particular barrel of a firearm. If desired, aplurality of identical miniature surface markings can be formed, atspaced locations about the interior surface adjacent the breech end of agun barrel of a firearm, to make it more difficult for an end user tolocated and completely remove all of such miniature surface markingsfrom the interior surface of the breech end of the gun barrel soprocessed or marked.

It is to be appreciated that a plurality of identical imaging systems 1,each similarly to any one of the above described embodiments, can besimultaneously used in combination with one another to form, drill orburn a desired matrix of features in the same object to be processed O.Further, it is to be appreciated that there are a variety of differentarrangements that could be utilized to move the object to be processed Orelative to the focused beam 43. For example, the object O, the fieldcollimating lens other holographic component 22, and the holographicimaging lens 32 can all be mounted on a table 56 which is movable in theX-axis and the Y-axis directions and coupled to the computer 20 forcontrolling movement of the table 56 relative to the focused beam 43(FIG. 9). Alternatively, the X-axis Y-axis repeat positioner 14, 18 canbe replaced with a single mirror mounted on a table 12′ and movable inboth the X- and Y-axis directions (FIG. 10). This table 12′ is alsocoupled to the computer 20 and appropriately moves to redirect the lightbeam 4 to a desired rear surface of the field collimating lens otherholographic component 22 to facilitate illumination of a desired one ofthe holographic imaging segments 36. As such teaching in conventionaland well known in the art, a further detailed description concerning thesame is not provided.

With reference to FIG. 11, an embodiment is shown in which the entireimaging system 1 is diagrammatically housed within an enclosure 62. Theenclosure 62 also accommodates the computer 20 which is coupled, asdescribed above, to control operation of the imaging system 1. Inaddition, a monitor 64 as well as a keyboard 66 are coupled to thecomputer 20. The keyboard 66 facilitates inputting of a desiredcommand(s), by an end user, to the computer 20 for controlling operationof the imaging system 1 and the monitor 64 facilitates viewing of anysuch entered command(s) as well as viewing of any warnings, error(s),messages, instructions, queries, data, information, etc., to bedisplayed by the imaging system 1. Computer software 68 is incorporated,in a conventional manner, into the computer 20 which facilitatesoperation and control of the laser 2 and the X-axis and Y-axis automatedrepeat positions 14, 18 as well as controlling relative movement betweenthe object to be possessed O a remainder of the imaging system 1.

The support frame 72 generally comprises four legs or sides 74 (only twoof which are shown in FIG. 11) which facilitates supporting a topworking surface 76 at a desired distance from a floor or ground surface78. As can be seen in FIG. 11, all of the components of the imagingsystem 1 are housed within the enclosure 62 which is suspended, at afixed location by additional framework 80, a desired working distance Dabove a central area of the working surface 76. A desired object to beprocessed or marked 82 with blind via(s), aperture(s), opening(s),indicia, indentation(s), feature(s) or other surface formation(s) 44,e.g. a flexible coated or uncoated web, can be unwound and dispensed viaconventional web dispensing equipment 84 and conveyed across the workingsurface 76 of the imaging system 1 of the present invention. As thedesired object to be processed or marked 82 is conveyed across theworking surface 76, the top surface of the desired object to be marked82 is suitably marked, e.g. formed, burnt or drilled, with the desiredblind via(s), aperture(s), opening(s), indicia(s), indentation(s),feature(s) or other surface formation(s) 44.

Following such marking, the processed object to be marked 82 is thenrewound by conventional rewinding equipment 86 and ultimately conveyed,in a known manner, to other operation(s) for further processing. It isto be appreciated that the dispensing equipment 84 and the rewindingequipment 86 are both coupled to the computer 20, via conventionalelectrical couplings, to facilitate control of either uniform sequentialindexing or continuous feed, of the desired object to be processed ormarked 82, at a desired processing speed along the working surface 76 ofthe imaging system 1 to facilitate marking of the desired object to beprocessed or marked 82 at a desired production rate.

In a preferred form of the present invention, the holographic imaginglens 32 is supported by a holographic imaging array plate 87 which ismounted by a horizontal adjustment mechanism 88 (FIG. 12) to facilitatealigning the horizontal plane P of the holographic imaging lens 32 sothat this horizontal plane is position exactly parallel with the topworking surface 76 of the imaging system 1. To facilitate suchalignment, preferably one corner portion of the holographic imaging lens32 is fixedly mounted 90 to the enclosure 62 (not shown in detail) butthat corner is allowed to pivot relative thereto. Each of the threeother corners or portions of the holographic imaging lens 32 are alsosupported by a separate linear actuator 92. Each one of these threelinear actuators 92 is coupled to a mating position sensor feedbackdevice 94 and all of the linear actuators 92 and their associatedposition sensor feedback devices 94 are coupled to the computer 20 tofacilitate controlling operation of those components.

Prior to processing of the desired object by the imaging system 1, thecomputer 20 sequentially actuates each one of the imaging segments 36,comprising the holographic imaging lens 32, to confirm that the workingdistance D between the holographic imaging lens 32 and the workingsurface 76 of the imaging system 1 are correctly positioned and/or thatthe holographic imaging lens 32 is aligned exactly parallel with respectto the working surface 76. In the event, that any adjustment of theholographic imaging lens 32 relative to the working surface 76 of theimaging system 1 is required, a suitable one or ones of the linearactuators 92 is/are supplied with electrical power to operate aninternal drive (not shown in detail) in a first direction to raise thatend portion of the holographic imaging lens 32, along a Z-axis extendingperpendicular to the working surface 76, by a suitable distance, or inan opposite direction, along the Z-axis extending perpendicular to theworking surface 76, to lower that end portion of the holographic imaginglens 32 by a suitable distance. Once this occurs, the computer 20 thenagain actuates each one of the imaging segments 36 to verify whether onnot the holographic imaging lens 32 is properly horizontally alignedwith the working surface 76. This alignment procedure continues untilthe computer 20 determines that the holographic imaging lens 32 issuitably horizontally aligned with respect to the working surface 76.

With reference to FIG. 13, incorporation of the imaging system 1,according to the present invention, as a component and incorporated inpart of a production line, will now be briefly described. As can be seenin FIG. 13, an uncoated web 96 is initially manufactured by aconventional process and wound a core 98. The core 98 is supported byconventional dispensing or unwinding equipment 100 to facilitateunwinding of the uncoated web 96 in a uniform manner. During operation,the uncoated web 96 is transported, as is typical in this art, over aplurality of spaced rollers (not numbered) and fed into an inlet of acoater 102 where a suitable coating, e.g. powder, metal deposition,dielectric deposition, is applied to either one or both opposed surfacesof the uncoated web 96. The thus coated web 103 is then conveyed throughan oven 104 where the heat emitted from the oven facilitates adhesion ofthe powder coating to one of both surfaces of the coated web 103.

Next, the coated web 103 is conveyed over a plurality of spaced rollers(not numbered) and fed across the working surface 76 of the imagingsystem 1, according to the present invention, where the desired blindvia(s), aperture(s), opening(s), indicia(s), indentation(s), feature(s),or other surface formation(s) 44 are formed, burnt or drilled, asdescribed above, in the top surface 42 of the coated web 103. Finally,the coated and appropriated processed or marked coated web 105 thenpasses over a plurality of spaced conventional rewind rollers (notnumbered), to facilitate proper rewinding of the coated and appropriatedprocessed or marked coated web 105, and is wound on a rewound core 106by conventional rewind equipment 108. The rewound core 106 of suitablycoated and appropriated processed or marked web 105 can then be furtherprocessed, as required by conventional equipment in a known manner.

In a preferred form of the invention, a machine vision camera 112 (onlydiagrammatically depicted in FIG. 13) is coupled to the computer 20 ofthe imaging system 2, via a conventional cable 114, for observing theobject to be processed O to view the drilling, burning, and/or formationof the desired blind via(s), aperture(s), opening(s), indicia(s),indentation(s), feature(s), or other surface formation(s) 44 in adesired surface of the object to be processed O. Once the desired blindvia(s), aperture(s), opening(s), indicia(s), indentation(s), feature(s),or other surface formation(s) 44 are formed, burnt or drilled in theobject to be processed O by the imaging system 2, the object to beprocessed O can then be further manipulated by the production line, e.g.be rewound on a core, can be package or further conveyed, etc.,depending upon the particular application. The computer 20 is typicallyelectrically connected, by a cable 116 and 118, to motors (not shown)which control drive of the dispensing or unwinding equipment 100 and therewinding equipment 108 for controlling further manipulation ormanufacturing, inspection, transportation, processing, sorting,orientation, etc., of the object to be processed O As such teaching iswell known in the art and as the present invention primarily relates tothe imaging system 2, a further detailed description concerning themachine vision camera 112 and its associated components are notprovided.

Suitable lasers, for use with the present invention, will now be brieflydiscussed. The present invention contemplates use of a variety ofdifferent lasers such as a slow flow CO2, CO2 TEA(transverse-electric-discharge), Impact CO2, and Nd:YAG, Nd:YLF, andNd:YAP and Nd:YVO and Alexandrite lasers. In addition, it is to beappreciated that the imaging system 1, according to the presentinvention, can utilize all other forms of lasers including gas dischargelasers, solid state flash lamp pumped lasers, solid state diode pumpedlasers, ion gas lasers, and RF wave-guided lasers. The above identifiedlasers are currently available on the market from a variety of differentmanufacturers.

As used in the appended claims, the term “coherent light beam” isintended to cover ultraviolet, visible, infrared, and/or other types ofknown light radiation beams employed to form a desired formation in asurface of the object to be processed.

It is to be appreciated that the present invention is applicable to bothcollimated light as well as non-collimated light.

Since certain changes may be made in the above described method andsystem, without departing from the spirit and scope of the inventionherein involved, it is intended that all of the subject matter of theabove description or shown in the accompanying drawings shall beinterpreted merely as examples illustrating the inventive concept hereinand shall not be construed as limiting the invention.

Wherefore, I/we claim:
 1. An imaging system for ablating a desired arrayof features in an object to be processed, the imaging system comprising:a laser for generating an outputting a coherent light beam; an X-axisand Y-axis automatic repeat position for redirecting a path of thecoherent light beam; a focusing member for receiving the redirectedlight from the X- and Y-axis repeat positioners and focusing thecoherent light beam at a desired one of a plurality of holographicimaging segments forming a holographic imaging lens; and each one of theholographic imaging segments, comprising the holographic imaging lens,forming a desired formation in a surface of the object to be processed.2. The imaging system according to claim 1, wherein the coherent lightbeam is one of an ultraviolet coherent light beam, an invisible coherentlight beam, and a coherent radiation coherent light beam and at leastone expansion lens for receiving the coherent light beam, outputted bythe laser, and suitably altering a diameter of the coherent light beam.3. The imaging system-according to claim 2, wherein there are first andsecond expansion lenses, which are sequentially arranged one afteranother, to suitably expand the coherent light beam to a desireddiameter.
 4. The imaging system according to claim 1, wherein the X-axisand Y-axis repeat positioner comprises a first reflective mirror coupledto an X-axis repeat positioner for controlling a refraction of thecoherent light beam along an X-coordinate and a second reflective mirrorcoupled to a Y-axis repeat positioner for controlling reflection of thecoherent light beam along a Y-axis coordinate.
 5. The imaging systemaccording to claim 1, wherein the focusing member is one of a flat fieldcollimating lens, a refractive component, a defractive component and aholographic component.
 6. The imaging system according to claim 1,wherein the focusing member is a holographic imaging lens.
 7. Theimaging system according to claim 1, wherein the operation of the laseris controlled by a computer, and the computer also controls at least oneof the X- and Y-repeat positioners, the focusing member, the holographicimaging lens, and a position of the object to be processed.
 8. Theimaging system according to claim 1, wherein the holographic imaginglens is located between 5 mm and 1,000 mm from a top surface of theobject to be processed.
 9. The imaging system according to claim 1,wherein the X-axis and Y-axis repeat positioners, the focusing memberand the holographic imaging lens are all combined with one another toform a single unit.
 10. The imaging system according to claim 1, whereinthe holographic segments, are located closely adjacent one another in aplanar relationship in an array and form an integral structure.
 11. Theimaging system according to claim 1, wherein each one of the holographicimaging segments forms a single desired formation in a surface of theobject to be processed.
 12. The imaging system according to claim 1,wherein the focusing member is a holographic imaging lens which receiveslight from the coherent light beam and redirects the supplied light as asubstantially collimated beam at a desired portion of the rear surfaceof the holographic imaging lens.
 13. The imaging system according toclaim 1, wherein the holographic imaging lens is designed as aholographic imaging keyboard and each holographic imaging segment of theholographic imaging keyboard is designed to form a desired indicia in asurface of the object to be processed.
 14. The imaging system accordingto claim 1, further comprising an enclosure for incorporating theholographic imaging system, the enclosure is supported by a supportframe and spaced from a top working surface of the support frame by aworking distance, the support frame is located adjacent dispensingequipment for conveying a desired object to be processed across theworking surface of the imaging system and is located adjacent rewindequipment for rewinding the object to be processed following processing.15. The imaging system according to claim 1, wherein a monitor, forviewing operation of the imaging system, is coupled to the computer, anda keyboard, for inputting desired commands to the imaging system, iscoupled to the computer.
 16. An imaging system for ablating a desiredarray of features in an object to be processed, the imaging systemcomprising: a laser for generating an outputting a coherent light beam;at least one expansion lens for receiving the coherent light beam,outputted by the laser, and suitably altering a diameter of the coherentlight beam; an X-axis and Y-axis automatic repeat position forredirecting a path of the coherent light beam; a focusing member forreceiving the redirected light from the X- and Y-axis repeat positionersand focusing the coherent light beam at a desired one of a plurality ofholographic imaging segments forming a holographic imaging lens; andeach one of the holographic imaging segments, comprising the holographicimaging lens, forming a desired formation in a surface of the object tobe processed; and a computer for controlling operation of one or more ofthe laser, the X- and Y-repeat positioners, the focusing member, theholographic imaging lens, and a position of the object to be processedto facilitate ablating a desired array of features in the object to beprocessed.
 17. The imaging system according to claim 16, wherein theX-axis and Y-axis repeat positioners, the focusing member and theholographic imaging lens are all combined with one another to form asingle unit, and the holographic segments, are located closely adjacentone another in a planar relationship in an array and form an integralstructure.
 18. The imaging system according to claim 16, wherein theholographic imaging lens is designed as a holographic imaging keyboardand each holographic imaging segment of the holographic imaging keyboardis designed to form a desired indicia in a surface of the object to beprocessed.
 19. The imaging system according to claim 16, furthercomprising an enclosure for incorporating the holographic imagingsystem, the enclosure is supported by a support frame and spaced from atop working surface of the support frame by a working distance, thesupport frame is located adjacent dispensing equipment for conveying adesired object to be processed across the working surface of the imagingsystem and is located adjacent rewind equipment for rewinding the objectto be processed following processing.
 20. An imaging system for ablatinga desired array of features in an object to be processed, the imagingsystem comprising: laser means for generating an outputting a coherentlight beam; an X-axis and Y-axis automatic repeat positing means forredirecting a path of the coherent light beam; focusing means forreceiving the redirected light from the X- and Y-axis repeat positingmeans and focusing the coherent light beam at a desired one of aplurality of holographic imaging means forming a holographic imaginglens means; and each one of the holographic imaging means, comprisingthe holographic imaging lens means, forming a desired formation in asurface of the object to be processed.